RF magnetron sputtering of Bi12TiO20 thin films on various substrates
نویسندگان
چکیده
منابع مشابه
Characterization of PZT Ferroelectric Thin Films by RF-magnetron Sputtering
By using Radio Frequency (RF) magnetron sputtering method, Pb(Zr0.5Ti0.5)O3 (PZT) thin films were deposited on Pt/Ti/ SiO2/Si substrates. Pt/Ti bottom electrode was fabricated on SiO2/Si substrates by magnetron dual-facing-target sputtering system. Phase and crystalline structure analyses of the PZT films were performed on an X-ray diffraction(XRD), Surface morphology, roughness and particle si...
متن کاملTransparent, conductive ZnO:Al thin film deposited on polymer substrates by RF magnetron sputtering
In this paper, we present the optical, electrical, structural and mechanical properties exhibited by aluminum-doped zinc oxide (ZnO:Al) thin films produced by RF magnetron sputtering on polymeric substrates (polyethylene terephthalate, PET; Mylar type D from Dupont ) with a standard thickness of 100 mm. The influence of the uniaxial tensile strain on the electrical resistance of these films was...
متن کاملEu-doped GaN films grown on sapphire and GaAs substrates by RF magnetron sputtering
The growth of Eu-doped GaN (GaN:Eu) films has been performed on GaAs (100) substrates using RF magnetron sputtering method. The GaN layers exhibit a wurtzite structure. Substrate temperature and the pressure during the deposition do not influence the orientation of GaN:Eu films. After annealing of GaN films in NH3, a strong red luminescence at 622 nm due to Eu ions has been observed.
متن کاملColumnar Growth of Nanocrystalline ZnO Thin Films Prepared through RF Magnetron Sputtering
Nanocrystalline zinc oxide thinfilms have been prepared on glass substrates at different temperatures through planar RF-magnetron sputtering. The particle size reduction with respect to substrate temperature has been studied with x-ray 144 K. Saravanakumar et al diffraction (XRD) and atomic force microscopy (AFM). Cross-sectional transmission electron microscopic (TEM) studies employing dark-fi...
متن کاملNanocrystalline GaN and GaN:H Films Grown by RF-Magnetron Sputtering
The structural and optical properties of nanocrystalline GaN and GaN:H films grown by RF-magnetron sputtering are focused here. The films were grown using a Ga target and a variety of deposition parameters (N2/H2/Arflow rates, RF power, and substrate temperatures). Si (100) and fused silica substrates were used at relatively low temperatures (Ts ≤ 420K). The main effects resulting from the depo...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2021
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/1859/1/012060